JIMA RT RC-02B Micro Resolution X-Ray Chart
Micro-focus type of X-Ray inspection systems are currently in common use. The resolution chart is indispensable to adjust focal point. In general, it is necessary to maintain the capability of X-Ray systems. This micro-chart has been fabricated by using the latest semiconductor lithography techniques. As a result, sub-micron slits down to 0.4 micron. (0.4, 0.5, 0.6, 0.7, 0.8, 0.9, 1.0, 1.5, 2.0, 3.0, 4.0, 5.0, 6.0, 7.0, 10.0, 15.0 µ, 16 different widths).
Line and Space Pattern
The layout of slits is designed at horizontal and vertical positioning as per the above drawing for 2.0 micron. Black lines are Tungsten absorption material. Each width of Tungsten line and space is 2.0 micron. There are 7 lines (15 micron has only 5 lines). The outer edge is surrounded by wider lines of Tungsten.
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? Cross Section ?Si Base thickness: 60 micron) P-SiO2 (0.1μm)
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Specifications:
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| No. | Parts | Material | Size (mm) |
| -1 | Aluminum Plate | A2017P | 40 x 30 x 5 |
| -2 | Protection Film | Polycarbonate | 36 x 26 x 0.1 |
| -3 | Adhesive Material | Silicon | Included |
| -4 | Silicon Base | S | 5 x 5 x 0.06 |
| Absorption Material | W | t=1.0 µm |
